Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator

Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator

A high-overtone bulk acoustic resonator (HBAR) consisting of a piezoelectric film with two electrodes on a substrate exhibits a high quality factor (Q) and multi-mode resonance spectrum. By analyzing the influences of each layer’s material and structure (thickness) parameters on the effective electromechanical coupling coefficient (Keff), the resonance spectrum characteristics of Keff have been...

High-Overtone Bulk Acoustic Resonator

Bulk Acoustic Wave High Overtone Resonator

the acoustic waves propagation losses in solid solutions of Rare Earth in Ittrium Aluminium Garnets. Matrix were Y^^^AlcO..« found few times lower than that of YAG matrix. The high overtone bulk acoustic wave resonators made of Y-, Lu Alr01o were studies. The Q c .5—X X 2 I £. factor 1.5 2.0*10 at 3.5 4.0 GHz was experimentally found. 1 INTRODUCTION The practical interest to the investigation o...

High-overtone Bulk Acoustic Resonator as passive Ground Penetrating RADAR cooperative targets

cooperative targets J.-M Friedt, A. Saintenoy, S. Chrétien, T. Baron, É. Lebrasseur, T. Laroche, S. Ballandras, a) and M. Griselin SENSeOR SAS, Besançon, France IDES, UMR CNRS 8148, Université Paris Sud, France Laboratoire de mathématiques, UMR CNRS 6623, Université de Franche Comté, Besançon, France FEMTO-ST Time & Frequency, UMR CNRS 6174, Université de Franche-Comté, Besançon, France ThéMA, ...

Improved Resonance Characteristics by Thermal Annealing of W/SiO2 Multi-Layers in Film Bulk Acoustic Wave Resonator Devices

In this paper, we, for the first time, present the effects of the thermal annealing of the W/SiO 2 multi-layer Bragg reflectors on the resonance characteristics of the ZnO-based film bulk acoustic wave resonator (FBAR) devices. In order to improve the resonance characteristics of the FBAR devices, we employed a thermal annealing process after the Bragg reflectors were formed on a silicon substr...